Brookside’s chamber matching software uses probability charts to compare several chambers simultaneously. Probability charts help identify problems with repeatability (between wafers), stability (within wafers), and accuracy (between chambers). Our chamber matching software helps answer the question of whether the repeatability and stability of your process are the same across multiple chambers and tools. Probability charts also provide an excellent crosscheck for whether process data is uniformly distributed and where preferred EPT control limits can be set.

• Graphical displays of statistics and data allow the user to detect very small to large changes in baseline, see wafer-to-wafer and chamber-to-chamber repeatability, and signal stability during wafer processing.
• Assists the user in setting control limits, especially for signals which do not have a “normal” distribution.