EPT is Brookside’s fault detection software. It works by analyzing data collected by Process Station. Analysis can be performed both offline as well as real-time in the fab during wafer processing. EPT can send stop commands automatically to the tool whenever an SPC control limit is violated.
- Limits can be placed on time in step or statistical calculations of any variable, including minimum, maximum, average, standard deviation, average slope, beginning slope, ending slope, sum, sum**2, average**2, standard deviation/average, average – average of last section
- Sectioning of the data is very flexible and can be based on step number or combinations of variables and signal transitions
- Selection of which EPT file to use is based on logistics (product, recipe, lot ID, chamber, etc.)
EPT supports all of the tools Process Station supports.
View current list.
There are demos available for many versions of EPT.
Click here to learn more.